| 摘要 |
PURPOSE: An air bearing cylinder of machine tool is provided to supply the pneumatic pressure corresponding to vertical load, although the vertical load actuating on a Z-axis slider is changed. CONSTITUTION: An air bearing cylinder of machine tool comprises a base(110), a housing(111), a cylinder body(33), a piston shaft(151), a piston, and first and second bearing member groups. The first air pressure(P1) is provided through a first air supply port of the base. The first air pressure and the second air pressure are provided through a second air supply port of the housing. A cover is installed on the upper of the cylinder body and comprises a main drain hole. The piston shaft passes through the base and housing. The piston has a supply hole and a drain hole. The first bearing member group is arranged inside the housing and supplies the outer diameter part of the piston shaft. The second bearing member group is arranged in the outside of the side supply hole. The second bearing member group forms an air gap with the inside diameter of the cylinder body.
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