METHOD AND DEVICES FOR CONTROLLING AND DEPOSITING FUNCTIONAL NANOPARTICLES USING THERMOPHORETIC EFFECT

摘要

PURPOSE: A device and method for controlling and depositing nano particles by a thermophoretic method are provided to control aerosol type nano particles under a uniform speed field, thereby depositing nano particles on an accurate location. CONSTITUTION: A spray nozzle(102) is placed on a substrate(101). Nano particles are sprayed through the spray nozzle. The substrate is divided into a central area(101a) and a side area(101b). An upper temperature plate(110) and a lower temperature plate(140) are installed around the substrate. The upper temperature plate is installed on the spray nozzle. Thermoelectric elements(144,146) are installed on a central temperature plate(120) and a side temperature plate(130).