| 摘要 |
PURPOSE: A probe card is provided to reduce thermal deformation by forming a plurality of heat emitting holes on a cover and easily emitting heat generated from a first substrate structure. CONSTITUTION: A first substrate structure(110) includes a first substrate(112) and a connector(114). A second substrate structure(120) includes a second substrate(121), a plurality of guiding bars, and a plurality of probes. A connecting unit(130) connects the terminal of the probes and the connector of the first substrate structure. A reinforcing plate(140) includes a body part(142) and a cover(144) equipped with heat emitting holes. A flatness adjusting screw(150) adjusts the flatness of the second substrate structure. |
