| 摘要 |
<p>PURPOSE: The liquid exchanging method of a circulating line in a single wafer type liquid processing apparatus is provided to suppress the amount of waste liquid by stopping the operation of a liquid supplementing part according to a pre-set supplement stopping condition. CONSTITUTION: A tank(13) is arranged in a circulating line. A liquid side level sensor(14) is arranged in the tank. A liquid supplementing part(15) supplements processing liquid into the tank according to the liquid side level sensor. A liquid exchange controlling part(16) stops the operation of the liquid supplementing part according to a pre-set supplement stopping condition. The processing liquid in the tank is scrapped according to a pre-set liquid scrapping condition.</p> |
