MANUFACTURING METHOD OF MICRO ENERGY GENERATOR DEVICE WITH DIELECTRIC ELASTOMER, PORTABLE ELECTRONIC APPARATUS INCLUDING THE DEVICE, METHOD FOR GENERATION USING THE PORTABLE ELECTRONIC APPARATUS AND WIRELESS KEYBOARD INCLUDING THE DEVICE

摘要

PURPOSE: A manufacturing method of a micro dielectric elastomer energy collector, a portable electronic device equipped with the micro dielectric elastomer energy collector, an energy collecting method using the portable electronic device, and a wireless keyboard equipped with the micro dielectric elastomer energy collector are provided to store applied predetermined mechanical energy to electric energy. CONSTITUTION: A silicon substrate is oxidized(S200-1). The patterning and etching of the silicon substrate is operated. A fixed frame is manufactured(S300-1). A dielectric elastomer is attached to the upper part of the fixed frame(S400-1). An electrode layer is attached to the upper part of the dielectric elastomer(S500-1). A dielectric elastomer group is formed by attaching the dielectric elastomer in the top(S600-1).