发明名称 Optical switch and control method of optical switch, and control method of MEMS device
摘要 A control section of an optical switch calculates information relating to a polarization amount in an insulating film at each predetermined time, to update the information relating to the polarization amount in the insulating film. On the other hand, when a drive voltage is applied to a MEMS mirror, an initial value of the drive voltage corresponding to an input setting command is read out from an initial value memory, and also, the information relating to the polarization amount in the insulating film is read out from the polarization amount memory, and the initial value of the drive voltage is corrected according to the read information relating to the polarization amount in the insulating film, to thereby set a new drive voltage, and the new drive voltage is applied on electrodes of the MEMS mirror.
申请公布号 US7961993(B2) 申请公布日期 2011.06.14
申请号 US20080292278 申请日期 2008.11.14
申请人 FUJITSU LIMITED 发明人 SHIMIZU TAKASHI;MORI KAZUYUKI
分类号 G02B6/26;G02B26/08 主分类号 G02B6/26
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