| 摘要 |
PURPOSE: A glass cleaning brush unit for a display device is provided to improve the intensity of the unit by installing a carbon braiding pipe inside a brush pipe. CONSTITUTION: A brush cleaning unit includes a first brush unit and a second brush unit. The brush units are arranged in a processing chamber. The first brush unit includes a brush(422), a brush shaft(424), and a motor. The brush eliminates contaminants from a substrate by being in contact with the substrate. The brush is installed at a brush pipe. The brush shaft includes an external pipe(424a) and a reinforcing pipe(424b).
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