| 摘要 |
PURPOSE: A head cleaning unit is provided to reduce costs by removing consumption goods such as wiper used for head cleaning and to improve the cleanliness of a head nozzle by cleaning a porous absorbent member. CONSTITUTION: A head cleaning unit(600) includes a bath(610), a cylindrical porous absorbable member(620) which is installed in the bath and contacts the nozzle; a press member(640) pressurizing the porous absorbable member in order to discharge the liquid absorbed in the porous absorbable member. A chemical liquid discharging apparatus comprises a substrate support unit which is movable in a first direction, a plurality of inkjet heads(212) discharging the processing liquid to the substrate, and the head cleaning unit. |
