Method for forming ZnO based thin film co-doped with silver and group III element and thin film formed using the same,申请号KR20090103613-传众专利搜索

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发明名称	Method for forming ZnO based thin film co-doped with silver and group III element and thin film formed using the same
摘要
申请公布号	KR101040138(B1)	申请公布日期	2011.06.10
申请号	KR20090103613	申请日期	2009.10.29
申请人		发明人
分类号	H01L21/20;H01L21/324	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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