APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE, AND CHEMICAL SUPPLY APPARATUS WITH THE SAME

摘要

PURPOSE: An apparatus and a method for controlling temperature and a chemical supplying apparatus including the same are provided to control the temperature of a mixed solution by controlling the current amount of a heater. CONSTITUTION: A first temperature sensor(122) measures the temperature of chemical stored in a chemical tank. A second temperature sensor(124) is installed in a circulating line circulating the chemical from the chemical tank in order to measure the temperature of the heater. A current adjusting part(152) adjusts the amount of a current supplied to the heater. A controlling part(154) receives temperature information from the temperature sensors and controls the current adjusting part.