| 摘要 |
Disclosed is an ozone gas supply system, wherein highly reliable ozone gas supply is possible, and that can supply ozone gas to ozone treatment devices while independently controlling the flow rate and the concentration of ozone gas. The ozone gas supply system has an ozone-gas output-flow-rate management unit (9) that can execute ozone-gas output-flow-rate control, wherein a plurality of ozone gas outputs are received from a plurality of ozone-generating units (7-1 to 7-n), and one or the combination of a plurality of the plurality of ozone gas outputs are selectively output to any ozone treatment device of the plurality of ozone treatment devices (12-1 to 12-n) by means of the opening/closing action of a plurality of ozone gas control valves (9a, 9b, 9c, 9bc, 9ab, 9ca) provided within. |
