发明名称 |
OXIDE EVAPORATION MATERIAL, TRANSPARENT CONDUCTING FILM, AND SOLAR CELL |
摘要 |
An oxide evaporation material according to the present invention includes a sintered body containing indium oxide as a main component thereof and cerium with a Ce/In atomic ratio of 0.001 to 0.110. The L* value in the CIE 1976 color space is 62 to 95. The oxide evaporation material with the L* value of 62 to 95 has an optimal oxygen amount. Accordingly, even when a small amount of an oxygen gas is introduced into a film-formation vacuum chamber, a transparent conducting film having a low resistance and a high transmittance in the visible to near-infrared region is formed by vacuum deposition methods. Since the amount of the oxygen gas introduced is small, the difference in composition between the film and the evaporation material is made small. This reduces the variations in composition and characteristics among films formed in large quantities.
|
申请公布号 |
US2011126899(A1) |
申请公布日期 |
2011.06.02 |
申请号 |
US20100916952 |
申请日期 |
2010.11.01 |
申请人 |
SUMITOMO METAL MINING CO., LTD. |
发明人 |
ABE YOSHIYUKI;WAKE RIICHIRO;KUWAHARA MASAKAZU;SOGABE KENTARO;OSHIRO AZUSA;YADA HISAKI |
分类号 |
H01L31/0224;H01B1/02;H01L31/032 |
主分类号 |
H01L31/0224 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|