METHOD OF MANUFACTURING ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION DEVICE HAVING ELECTROMECHANICAL CONVERSION FILM, LIQUID JET HEAD HAVING DEVICE AND LIQUID EJECTING APPARATUS HAVING LIQUID JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method capable of easily producing an electromechanical conversion film constructing an electromechanical conversion device and reducing a use material, a liquid jet head having the device and a liquid ejecting apparatus having the head.

SOLUTION: The method comprises step (1) of forming a surface modification area on a region on a first electrode other than a region where an electromechanical conversion film is provided, by applying preliminarily a surface modification liquid by the inkjet method; step (2) of applying a sol-gel liquid containing a piezoelectric precursor on a portion on the first electrode as a not-surface modification region where the electromechanical conversion film is provided, by the inkjet method; and step (3) of heating and processing the sol-gel applied film to constructs an electromechanical conversion device by forming a patterned electromechanical conversion film. When the electromechanical conversion film is thickened, the step (2) and the step (3) are repeated. It is applied for a liquid jet head and a liquid ejecting apparatus.

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