| 摘要 |
PURPOSE: A separation method of hydrogen gas and monosilane gas using a membrane member, and a separation apparatus thereof are provided to economically and effectively separate the hydrogen gas and the monosilane gas discharged during a producing process of poly-silicon. CONSTITUTION: A separation apparatus of hydrogen gas and monosilane gas using a membrane member comprises the following: a reactor(100) for producing poly-silicon; a mixed gas pipe(101) discharging mixed gas of the hydrogen gas and the monosilane gas from the reactor; more than one hydrogen separating module(110); a hydrogen gas pipe(102) discharging the separated hydrogen gas; and a residual gas pipe(103) discharging the residual gas.
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