| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate controller capable of certainly adjusting a flow rate of fluid. <P>SOLUTION: The flow rate controller 61 has a cylindrical body 62, a flow passage control member 64, a cylindrical actuating member 67, and a supporting body 69. The cylindrical body 62 has a deformable portion. The flow passage control member 64 has a control groove 65. The cylindrical actuating member 67 has a pressing portion 66. The cylindrical actuating member 67 surrounds the cylindrical body 62, and moves while pressing the deformable portion by the pressing portion 66. Therefore, the flow rate is adjusted by the control groove 65. <P>COPYRIGHT: (C)2011,JPO&INPIT |
