发明名称 ROBOT ARM AND CONVEYING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a robot arm allowing achieving of the operation without requiring high alignment accuracy for a member constituting the robot arm, and a conveying device using the robot arm. SOLUTION: A guide mechanism 10 includes guide shafts 15 and a guide plate 16 as a member for guiding the movements of the guide shafts 15. In the guide plate 16, guide hole forming members 17 for forming guide holes 17a inserted with the guide shafts 15 therein are fixed. Each of the guide holes 17a is formed to be a longer shape in an X-axis direction to be one direction and guides the movements of the guide shafts 15 to move in the X-axis direction by making the guide plate 16 as a base. A gap Q is provided between an outer peripheral surface 18a of a bearing roller 18 and inside walls 17b of the guide hole forming members 17. As a result, a degree of freedom in each of the guide shafts 15 can be maintained in a substantial gravity direction, and also flexibility in each of the movements in a Y-axis direction of the guide shafts 15 and the bearing roller 18 is secured. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011104695(A) 申请公布日期 2011.06.02
申请号 JP20090261133 申请日期 2009.11.16
申请人 ULVAC JAPAN LTD 发明人 NAKAO HIROTOSHI;NISHITSUJI MUNEYOSHI;KURIYAMA TAKUYA;MAEHARA MOTOKI;CHIBA TAIJI;YOSHINO TAKAHIRO
分类号 B25J9/06;B25J17/00;B65G49/06;H01L21/677 主分类号 B25J9/06
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