| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and method for cleaning a micro flow passage. SOLUTION: The system includes a chip 32 which forms a micro flow passage 34 producing a desired product from a raw material liquid in a state immersed in fluids 14 and 16 supplied to a housing 12, switching valves 28 and 38 interposed on a route immersed in the fluid, one being connected to the micro flow passage 34 side and the other being connected mutually switchably between the fluid side and a circulation side of the raw material liquid, a vacuum pump 50 depressurizing the inside of the housing 12 to produce bubbles in the micro flow passage 34, an ultrasonic vibrator 52 discharging the bubbles outside the micro flow passage 34 while irradiating the micro flow passage 34 with ultrasonic waves to clean the inside of the micro flow passage 34, and a control means for switching-controlling the connection of the switching valves 28 and 38 to the fluid side in cleaning the micro flow passage 54, and at the same time, activating the ultrasonic vibrator 52 and the vacuum pump 50. The system enables a stationary cleaning of the micro flow passage 34. COPYRIGHT: (C)2011,JPO&INPIT
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