发明名称 MEMS Scan Controller Generating Clock Frequency and Control Method Thereof
摘要 A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.
申请公布号 US2011127404(A1) 申请公布日期 2011.06.02
申请号 US20080254564 申请日期 2008.10.20
申请人 YEN WEI-SHIN 发明人 YEN WEI-SHIN
分类号 G01J1/16;G02B26/10 主分类号 G01J1/16
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