| 摘要 |
PROBLEM TO BE SOLVED: To bring a probe into contact into a test pad without breaking a circuit formed within a chip, during probe inspection. SOLUTION: A weighting jig 14, a pressing tool 9, an elastomer 9A, a bonding ring 6 and a plunger 3 are integrated with one another by an anchorage by nuts 11, 13 and a bolt 16C, for bring a probe into contact into a test pad, without breaking a circuit formed within a chip, during probe inspection. An elastic force of a spring 19 installed between a spring pressing jig 18 and the weighting jig 14 is caused to act in such a manner as to push down these integrated members toward pads PD3, PD4, and a pressing force transmitted from a spring 3A within the plunger 3 to a thin film sheet 2 is made to be used for only stretching of the thin film sheet 2. COPYRIGHT: (C)2011,JPO&INPIT
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