发明名称 APPARATUS TO COAT PHOTORESIST ON SUBSTRATE
摘要 <p>PURPOSE: A chemical spraying device is provided to easily disassembly a silt nozzle by outputting the slit nozzle through a slit nozzle output unit. CONSTITUTION: A gantry(3) is installed on a base(1). A slit nozzle(5) is combined with the gantry. A slit nozzle output unit(7) outputs the separated slit nozzle. The slit nozzle output unit includes a first transfer unit(9), a transfer member(13), a second transfer unit(15), a driving source for generating rotation force and a nozzle support member.</p>
申请公布号 KR20110057752(A) 申请公布日期 2011.06.01
申请号 KR20090114292 申请日期 2009.11.25
申请人 DMS CO., LTD. 发明人 LEE, JUN SEOK;LEE, SANG SU;OH, SANG TAK
分类号 H01L21/302;H01L21/027 主分类号 H01L21/302
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