| 摘要 |
<p>PURPOSE: An air floating stage apparatus using cyclone units is provided to introduce cyclone units generating rotary flow so as to control movement of a substrate. CONSTITUTION: An air floating stage apparatus using cyclone units comprises a processing chamber(100) and an air floating stage(200). A predetermined process is performed in the processing chamber. The air floating stage floats and load a substrate by a plurality of cyclone units(250). The cyclone units are arranged on a flat plate(210) inside the processing chamber. The cyclone units include a main body and an air path. The air path provides an air jet path in the main body.</p> |
