发明名称 MOVING SYSTEM AND METHOD OF SAMPLE HOLDER
摘要 PURPOSE: A sample holder transfer system and method are provided to more precisely transfer a sample holder using a driving unit that is not directly coupled to the sample holder. CONSTITUTION: A sample holder transfer method is as follows. A controller activates a driving unit so that a worm gear(310) connected to the driving unit is rotated around a longitudinal axis. According to the rotation of the worm gear, threads formed on the end of the worm gear are meshed with saw teeth(220) formed on the exterior of an arc-shaped stage and the arc-shaped stage is rotated around a central shaft having a fixed curvature. According to the movement of the arc-shaped stage, a mounting member(240) that is fixed to the inner side of the arc-shaped stage and coupled with a sample holder is transferred.
申请公布号 KR20110058078(A) 申请公布日期 2011.06.01
申请号 KR20090114739 申请日期 2009.11.25
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 KIM, JU HWANG;MOON, DAE WON;KIM, TAE WOO
分类号 G01N1/36;G01N35/10;H01J49/04 主分类号 G01N1/36
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