发明名称 |
TANK FOR PRESERVING A CHEMICAL SOLUTION AND APPARATUS FOR SUPPLYING A CHEMICAL SOLUTION |
摘要 |
<p>PURPOSE: A chemical storing tank and a chemical supply device including the same are provided to maintain a constant level of chemical by forming a space saving unit with a constant volume on the bottom of the chemical storing tank. CONSTITUTION: A bottom unit(110) has an outlet(112) for discharging the chemical. A sidewall(120) provides a space for storing the chemical. A space saving unit(140) is formed on the bottom unit to have a constant volume around the outlet and reduces a space filled with the chemical. The space saving unit is inclined from the sidewall to the outlet.</p> |
申请公布号 |
KR20110057682(A) |
申请公布日期 |
2011.06.01 |
申请号 |
KR20090114175 |
申请日期 |
2009.11.24 |
申请人 |
SEMES CO., LTD. |
发明人 |
KANG, BYUNG CHUL |
分类号 |
H01L21/02;H01L21/027;H01L21/302 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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