发明名称 TANK FOR PRESERVING A CHEMICAL SOLUTION AND APPARATUS FOR SUPPLYING A CHEMICAL SOLUTION
摘要 <p>PURPOSE: A chemical storing tank and a chemical supply device including the same are provided to maintain a constant level of chemical by forming a space saving unit with a constant volume on the bottom of the chemical storing tank. CONSTITUTION: A bottom unit(110) has an outlet(112) for discharging the chemical. A sidewall(120) provides a space for storing the chemical. A space saving unit(140) is formed on the bottom unit to have a constant volume around the outlet and reduces a space filled with the chemical. The space saving unit is inclined from the sidewall to the outlet.</p>
申请公布号 KR20110057682(A) 申请公布日期 2011.06.01
申请号 KR20090114175 申请日期 2009.11.24
申请人 SEMES CO., LTD. 发明人 KANG, BYUNG CHUL
分类号 H01L21/02;H01L21/027;H01L21/302 主分类号 H01L21/02
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