| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method, in which cost and throughput are improved by maintaining a small installation area and controlling each staying time in an individual processing station. <P>SOLUTION: A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion. <P>COPYRIGHT: (C)2011,JPO&INPIT |
