HOLLOW MICROBODY AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a microbody composed of only the aimed element components and a method for producing the microbody. SOLUTION: In the method for producing the microbody, a microstructure composed of an organic material is arranged as a template, on a substrate, the aimed elements are deposited on the surface of the organic structure by a vacuum vapor deposition method or the like, and then the organic structure as the template is decomposed and removed by a UV-ozone treatment method or the like to obtain a microbody composed of only the aimed element components. COPYRIGHT: (C)2011,JPO&INPIT