发明名称 METHOD AND APPARATUS FOR EVALUATING RELEASABILITY
摘要 PROBLEM TO BE SOLVED: To provide a method and apparatus for evaluating releasability in consideration of a release rate. SOLUTION: When releasability is evaluated when an adherend is released from an adhesive sheet bonded to the adherend, an evaluation release rate used for evaluating releasability between the adherend and the adhesive sheet is calculated to evaluate releasability. For example, a release force is measured when the adhesive sheet is released at different release rates from a measurement member, which is bonded to the adhesive sheet, or the adherend, and an evaluation release rate is calculated based on the measured release force and the release rate in the measurement when the adherend is released from the adhesive sheet by a release apparatus different from that in the measurement. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011103373(A) 申请公布日期 2011.05.26
申请号 JP20090257723 申请日期 2009.11.11
申请人 LINTEC CORP;TOKYO INSTITUTE OF TECHNOLOGY 发明人 SAEKI NAOYA;KISHIMOTO KIKUO
分类号 H01L21/67;C09J5/00 主分类号 H01L21/67
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