发明名称 Plasma-Deposited Electrically Insulating, Diffusion-Resistant and Elastic Layer System
摘要 A multilayer system on a substrate, the multilayer system being applied to the substrate by plasma deposition, characterized in that the multilayer system is configured such that it has substantial diffusion resistance to ions in an aqueous solution, wherein the current produced by the diffusion of the ions with the connection of an electric field gradient of more than 104V/m, preferably more than 105V/m, most preferred more than 107V/m is IIon<6.5×10−8 A/cm2, preferably IIon<6.5×10−10 A/cm2, particularly IIon<1×10−12 A/cm2.
申请公布号 US2011122486(A1) 申请公布日期 2011.05.26
申请号 US20080528320 申请日期 2008.02.22
申请人 TECHNISCHE UNIVERSITAET KAISERSLAUTERN 发明人 BUSCH HEINZ WERNER;GRABOWY UDO HEINRICH;KLEINEN LISA
分类号 G02B1/12;A61N1/375;B32B9/04;C23C16/513;G02B5/20;H01L51/52 主分类号 G02B1/12
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