发明名称 FUSE IN THE SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 The present invention relates to a fuse in a semiconductor device and method for fabricating the same. An oxide film is formed on sidewalls of a barrier metal layer in a bottom portion of a fuse pattern, thereby preventing the barrier metal layer from being exposed. As a result, the oxidation of the barrier metal layer is inhibited to improve characteristics of the device.
申请公布号 KR101037452(B1) 申请公布日期 2011.05.26
申请号 KR20080103760 申请日期 2008.10.22
申请人 发明人
分类号 H01L23/62 主分类号 H01L23/62
代理机构 代理人
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