| 摘要 |
PROBLEM TO BE SOLVED: To provide a high voltage generation device for an electrostatic chuck which the high voltage generation device requires an input power extremely smaller than an input power required by a conventional high voltage generator. SOLUTION: The high voltage generation device includes a high voltage generation circuit 121 which amplifies a high-frequency signal output from an oscillation circuit 3 driven by a low-voltage power supply 2 and generates a high voltage using a high-frequency transformer, boosting/rectifying circuits 122 and 123 which raise the high voltage generated by the high voltage generating circuit 121 while rectifying the high voltage, an electrostatic chuck 22 serving as a capacitive load to which the high voltage raised and rectified by the boosting/rectifying circuits 122 and 123 is applied and discharge resistances R6 and R7 are connected in parallel, and a control circuit 110 which directly drives the oscillation circuit 3 with power from the low-voltage power supply 2 at the start of the generator, and drives the oscillation circuit 3 intermittently at a cycle shorter than a time constant determined by the capacitance of the electrostatic chuck 22 and the resistance values of the discharge resistances R6 and R7 with an elapse of a given time from the start of the generator. COPYRIGHT: (C)2011,JPO&INPIT |
