| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a non-contact type position/attitude measuring method, a non-contact type position/attitude measuring device, and a semiconductor mounting device equipped with the non-contact type position/attitude measuring device which allows the direct measurement of a position and an attitude of an object for the precise measurement and control of the position and the attitude, in which the measurement of the position and the attitude of the object by a non-contact manner simplifies modeling, by reducing an error caused by the modeling. <P>SOLUTION: A non-contact type position/attitude measuring device B including a measuring device 2 to which a position detector 15 of an encoder 10 and range finders 16 and 17 are attached, and a scale 11 of the encoder 10 which is attached to an object 9 is used to measure an interval and parallelism between the position detector 15 and the scale 11 using the range finders 16 and 17. A manipulator 13 of the measuring device 2 is controlled so that the interval and parallelism may become constant. The position and the attitude of the object 9 are measured using the position information of the measuring device 2, measured values of the range finders 16 and 17, and a measured value of the encoder 10. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
