METHOD TO PRODUCE NANOPARTICLES OF METAL-OXYGEN SYSTEM OF THE SPECIFIED COMPOSITION BY ELECTRON BEAM EVAPORATION AND CONDENSATION IN VACUUM

摘要

The invention pertains to synthesis of new nanomaterials in vacuum. A method to produce nanoparticles of metal -oxygen system by electron beam evaporation and condensation in vacuum is proposed, which includes simultaneous heating and evaporation of solid initial material and solid carrier material from at least two separate vessels in the vacuum chamber, mixing of vapour flows of initial material and carrier, deposition of mixed vapour flow on the substrate in the condensation zone with fixing of initial material nanoparticles on the substrate by carrier material which solidifies, and formation of nanoparticle condensate in the carrier. Used as the carrier material fixing the nanoparticles is a solid, soluble in liquid and evaporable in vacuum without decomposition simple or complex inorganic material.