发明名称 PATTERN-FORMING MEMBER AND METHOD OF MANUFACTURING THE SAME
摘要 <p>There are provided a patterned member which has densely arranged pits on the surface and which is easily manufactured, and a method for manufacturing such a patterned member. A patterned member includes a substrate 10, a thermally deformable heat mode photoresist layer 20 provided on the substrate 10, pits 21 formed on the photoresist layer 20. The pits 21 are arranged in line along a plurality of tracks which are substantially parallel to one another, and as viewed in a direction along which the tracks Tn extend, each pit 21 on one track is positioned at a position corresponding to a midpoint between two adjacent pits arranged on an adjacent track.</p>
申请公布号 EP2325676(A1) 申请公布日期 2011.05.25
申请号 EP20090809447 申请日期 2009.06.03
申请人 FUJIFILM CORPORATION 发明人 USAMI, YOSHIHISA
分类号 G02B1/11;B23K26/00;B23K26/36;G03F7/20;H01L33/00 主分类号 G02B1/11
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