发明名称 DUAL METAL GATE CORNER
摘要 In view of the foregoing, disclosed herein are embodiments of an improved field effect transistor (FET) structure and a method of forming the structure. The FET structure embodiments each incorporate a unique gate structure. Specifically, this gate structure has a first section above a center portion of the FET channel region and second sections above the channel width edges (i.e., above the interfaces between the channel region and adjacent isolation regions). The first and second sections differ (i.e., they have different gate dielectric layers and/or different gate conductor layers) such that they have different effective work functions (i.e., a first and second effective work-function, respectively). The different effective work functions are selected to ensure that the threshold voltage at the channel width edges is elevated.
申请公布号 KR20110055544(A) 申请公布日期 2011.05.25
申请号 KR20117003111 申请日期 2009.08.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NOWAK EDWARD;ANDERSON BRENT ALAN
分类号 H01L21/28;H01L29/423;H01L29/49 主分类号 H01L21/28
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