发明名称 Hydrostatic bearing and stage apparatus
摘要 A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured to jet air onto the sliding surface; and a suction part having a suction surface configured to suction the air jetted from the jetting surface onto the sliding surface. The suction surface is situated at one of an internal circumferential side and an external circumferential side of the jetting part and is positioned higher than a lower end of the jetting part.
申请公布号 US7946767(B2) 申请公布日期 2011.05.24
申请号 US20080168235 申请日期 2008.07.07
申请人 SUMITOMO HEAVY INDUSTRIES, LTD 发明人 NAKAJIMA RYUTA;NOMOTO TSUYOSHI;HOSOBATA TAKUYA
分类号 F16C32/06 主分类号 F16C32/06
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