| 摘要 |
<P>PROBLEM TO BE SOLVED: To attenuate quickly vibration in a direction before being switched when switching an excitation direction, in an angular velocity sensor of a time-sharing driving system. <P>SOLUTION: This sensor is equipped with: a flexible beam part; a support part for supporting the beam part; a weight part bonded to the beam part, and moving together with the beam part; an excitation means including a driving piezoelectric element provided on the beam part, for vibrating the weight part in a plurality of orthogonal excitation directions by switching at every prescribed time, a driving signal to be applied to the driving piezoelectric element; a detection means including a piezoelectric element for detection provided on the beam part, for detecting vibration of the weight part in a detection direction corresponding to Coriolis force based on a detection signal outputted from the piezoelectric element for detection; and a settling control means for applying to the driving piezoelectric element, a settling signal generated based on a signal related to vibration of the weight part before switching, during a switching period from after application finish of a driving signal for vibrating the weight part in the excitation direction before being switched until application of a driving signal for vibrating the weight part in an excitation direction different from the direction before being switched. <P>COPYRIGHT: (C)2011,JPO&INPIT |
