CHEMICAL LIQUID SUPPLY DEVICE AND CHEMICAL LIQUID SUPPLY METHOD

摘要

A chemical liquid supply device comprises a pump (12) which is provided with a pump chamber (15) expanded and contracted by an elastically deformable bellows (14). A chemical liquid within a chemical liquid container (10) is guided to the pump chamber (15) through a suction channel (21). The chemical liquid within the pump chamber (15) is discharged to a discharge nozzle (11) through a discharge channel (22). A circulation channel (23) is connected in a loop shape to the pump (12), and the circulation channel (23) is adapted to return to the pump chamber (15) the chemical liquid supplied from the pump chamber (15) and has an expansion and contraction section. The circulation channel (23) is provided with a filter (30) for filtering the chemical liquid which is to be returned to the pump chamber. The flow resistance of the filter is not applied to the pump (12) when the chemical liquid is discharged from the discharge nozzle (11), and as a result, a specific amount of the chemical liquid can be highly accurately discharged from the discharge nozzle (11).