INSPECTING APPARATUS

摘要

Disclosed is an inspecting apparatus, which is light-weight and capable of inspecting any portion of a substrate surface. Sub-base plates (111, 112) are provided on the side surfaces of a main base plate (21), and guide rails (41) are provided over the main base plate (21) and the sub-base plates (111, 112). Gantries (311, 312) are placed on the guide rails (41), and measurement is performed by moving the measuring points of measuring instruments (51a-51d) on the surface of a substrate (71) on the main base plate (21), said measuring instruments being attached to the gantries (311, 312). When the gantries (311, 312) are positioned on the sub-base plates (111, 112), the measurement points of the measuring instruments (51a-51d) are positioned outside of the region wherein the substrate (71) is disposed. When the gantries (311, 312) are moved along the guide rails (41) and the measuring instruments (51a-51d) are moved within a horizontal plane in the direction perpendicular to the direction wherein the gantries are moved, measurement can be performed at any position on the substrate surface by means of the measuring instruments (51a-51d).