发明名称 SHOWER HEAD, METHOD OF MANUFACTURING SHOWER HEAD, AND METHOD OF REGENERATING SHOWER HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a shower head wherein generation of particles is suppressed by buffering the friction produced between an upper plate and a lower plate. <P>SOLUTION: The shower head includes a thermal fusion sheet 11 composed of fluorine-containing ethylene polymer having a hydroxyl group and interposed between the upper plate 10 and the lower plate 12 in order to bond them each other. The upper plate 10, the lower plate 12, and the thermal fusion sheet 11 have a plurality of through holes 13, 14, and 15, respectively, wherein the plurality of through holes 15 formed in the thermal fusion sheet 11 preferably have a larger diameter than the plurality of through holes 13 and 14 formed respectively in the upper plate 10 and lower plate 12. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011100882(A) 申请公布日期 2011.05.19
申请号 JP20090255153 申请日期 2009.11.06
申请人 MITSUI ENG & SHIPBUILD CO LTD 发明人 KAWAHARA FUMITOMO
分类号 H01L21/31;C23C16/455;H01L21/3065;H05H1/46 主分类号 H01L21/31
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