| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform analysis without destroying an internal structure of a sample. <P>SOLUTION: An x-ray analysis apparatus includes an X-ray source emitting coherent X-rays; an X-ray collimator collimating the X-rays emitted from the X-ray source; an X-ray absorption section formed with an X-ray absorbing or reflecting material, provided with a reference hole and an X-ray transmission window at a position coherent to the X-rays, and irradiated with the collimated X-rays; a detector detecting a hologram produced by an interference with the sample placed at a position irradiated with the X-rays transmitted through the X-ray transmission window, scattered X-rays produced by the sample, and X-rays passing through the reference hole; and a processing unit performing a Fourier transform for obtaining an image of the internal structure of the sample based on the hologram obtained by the detector, wherein the sample can be moved relative to the X-ray absorption section. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
