| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angle detector with composite self-calibration function obtaining a high-precision calibration value without omission of a frequency component up to a higher order component while suppressing the number of sensor heads to the necessary minimum. <P>SOLUTION: In the angle detector with self-calibration function including first sensor heads arranged at equal intervals at the circumference of a dial and a second sensor head arranged at one position of the first sensor head by replacing the first sensor head with it, and obtaining a mean value by obtaining measurement differences between the second sensor head and each of the first sensor heads to perform self-calibration, the calibration is performed on the basis of a first set obtained by arranging L pieces of the first sensor heads and the second sensor head at equal intervals and a second set obtained by arranging M pieces of them at equal intervals. For the calibration value obtained by the second set, where the number of total divisions provided on the dial is P, the phase is shifted by each division of j*P/L(j=1 to L-1), a mean value of the calibration value obtained by the second set and the shifted calibration value is obtained, and the mean value is added to the calibration value obtained by the first set to output it as the resultant calibration value. <P>COPYRIGHT: (C)2011,JPO&INPIT |
