发明名称 SYSTEM AND METHOD FOR MANIPULATING AN ION BEAM
摘要 A system for manipulating an ion beam having a principal axis includes an upper member having a first and a second coil generally disposed in different regions of the upper member and configured to conduct, independently of each other, a first and a second current, respectively. A lower member includes a third and a fourth coil that are generally disposed opposite to respective first and second coils and are configured to conduct, independently of each other, a third and a fourth current, respectively. A lens gap is defined between the upper and lower members, and configured to transmit the ion beam, wherein the first through fourth currents produce a 45 degree quadrupole field that exerts a rotational force on the ion beam about its principal axis.
申请公布号 US2011114849(A1) 申请公布日期 2011.05.19
申请号 US20100944537 申请日期 2010.11.11
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES , INC. 发明人 SINCLAIR FRANK;BENVENISTE VICTOR M.;RADOVANOV SVETLANA;BUFF JAMES S.
分类号 H01J1/50 主分类号 H01J1/50
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