发明名称 COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
摘要 The present invention provides a computer generated hologram including a plurality of anisotropic cells having different refractive indices with respect to linearly polarized light in a first direction and linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, wherein the plurality of anisotropic cells are made of an identical material and includes a first anisotropic cell, a second anisotropic cell, a third anisotropic cell, and a fourth anisotropic cell which have different thicknesses, and the plurality of anisotropic cells change phases of linearly polarized light in the first direction and linearly polarized light in the second direction, thereby making a first light intensity distribution formed on a predetermined plane by the linearly polarized light in the first direction different from a second light intensity distribution formed on the predetermined plane by the linearly polarized light in the second direction.
申请公布号 US2011116069(A1) 申请公布日期 2011.05.19
申请号 US200913003829 申请日期 2009.07.17
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUBARA ISAO
分类号 G03F7/20;G03B27/72;G03H1/08 主分类号 G03F7/20
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