| 摘要 |
A resonator (3) comprising a body of silicon-based material having at least one resonant part (Z) comprising at least one portion covered in an electrical conduction layer (9) and at least one portion not covered in a conduction layer, the resonator being characterized in that the portion not covered in a conduction layer is covered in a passivation layer (10, 10 ') in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. The invention also provides a vibrating sensor including such a resonator and a method of fabricating the resonator. |
