Verfahren zur Herstellung von Siliciumschichten,申请号DE20091053806-传众专利搜索

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发明名称	Verfahren zur Herstellung von Siliciumschichten
摘要	Die vorliegende Erfindung betrifft ein Flüssigphasen-Verfahren zur thermischen Herstellung von Siliciumschichten auf einem Substrat, bei dem mindestens ein aus mindestens einem Hydridosilan der generischen Formel SiH(mit a = 3 - 10) herstellbares höheres Silan auf ein Substrat aufgebracht und nachfolgend thermisch in eine im Wesentlichen aus Silicium bestehende Schicht konvertiert wird, wobei die thermische Konvertierung des höheren Silans bei einer Temperatur von 500-900°C und einer Konvertierungszeit von &nlE; 5 Minuten erfolgt, die nach dem Verfahren herstellbaren Siliciumschichten und ihre Verwendung.
申请公布号	DE102009053806(A1)	申请公布日期	2011.05.19
申请号	DE20091053806	申请日期	2009.11.18
申请人	EVONIK DEGUSSA GMBH;FORSCHUNGSZENTRUM JUELICH GMBH	发明人	WIEBER, STEPHAN;PATZ, MATTHIAS;CARIUS, REINHARD;BRONGER, TORSTEN;COELLE, MICHAEL
分类号	B05D7/24;C23C18/12	主分类号	B05D7/24
代理机构		代理人
主权项
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