发明名称 SAMPLE TABLE FOR MICROSCOPE, AND INSPECTION METHOD FOR LINEAR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a sample table for a microscope in which sample table aligns the shaft of a sample with the rotating shaft of the sample table to adjust the position of the sample while saving space. SOLUTION: The sample table for the microscope is used to observe and examine different peripheral positions of a linear element sample S using a microscope. The sample table includes a rotor 20 (rotor A) having a rotating shaft 21 (rotating shaft a), a rotor 30 (rotor B) which is so supported relative to the rotor 20 as to be rotatable around a rotating shaft 31 (rotating shaft b) eccentric to the rotating shaft 21, and a rotor 40 (rotor C) which is so supported relative to the rotor 30 as to be rotatable around a rotating shaft 41 (rotating shaft c) eccentric to the rotating shaft 21 and to the rotating shaft 31 and has a sample holder 10 holding the shaft of the sample S substantially parallel with the rotating shaft 21. The rotating shafts 21, 31, and 41 and the sample holder 10 are arranged such that rotating at least one of the rotating shafts 30 and 40 brings the shaft of the sample S into coaxial with the rotating shaft 21. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011100629(A) 申请公布日期 2011.05.19
申请号 JP20090254681 申请日期 2009.11.06
申请人 SUMITOMO ELECTRIC IND LTD 发明人 YAMAKAWA SHINKO;KAWADA KUNIYASU
分类号 H01J37/20 主分类号 H01J37/20
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