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发明名称
摘要
申请公布号	JP4683233(B2)	申请公布日期	2011.05.18
申请号	JP20060537796	申请日期	2005.09.29
申请人		发明人
分类号	C30B33/10;H01L21/304;H01L21/306	主分类号	C30B33/10
代理机构		代理人
主权项
地址

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