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发明名称
摘要
申请公布号
JP4685228(B2)
申请公布日期
2011.05.18
申请号
JP20000333020
申请日期
2000.10.31
申请人
发明人
分类号
C23C14/35;H01L21/203;H01L21/285
主分类号
C23C14/35
代理机构
代理人
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地址
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