发明名称 Method and apparatus for detecting lithographic hotspots in a circuit layout
摘要 Method for detecting hotspots in a circuit layout includes constructing a layout graph having nodes, corner edges and proximity edges from the circuit layout, converting the layout graph to a corresponding dual graph, and iteratively selecting edges and nodes having weights greater than a predetermined threshold value at each iteration as hotspots.
申请公布号 US7945870(B2) 申请公布日期 2011.05.17
申请号 US20070725396 申请日期 2007.03.19
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 KAHNG ANDREW B.;PARK CHUL-HONG;XU XU
分类号 G06F17/50 主分类号 G06F17/50
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