MEASURING METHOD OF THIN FILM THICKNESS BY SPRING CONSTANT OF AFM TIP

摘要

PURPOSE: A method for measuring the thickness of a thin film using the spring constant of an atomic force microscope probe is provided to accurately measure the thickness of a thin film and measure the uniformity of thickness. CONSTITUTION: A method for measuring the thickness of a thin film using the spring constant of an atomic force microscope probe comprises following steps. A probe(11) of an atomic force microscope is manufactured. The change of the power is measured in reconstitution by the probe of the atomic force microscope after the surface of the thin film sample is pressed. The thickness of the thin film is calculated using the change of the power and the spring constant of the probe.