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发明名称
VERFAHREN ZUR BILDUNG EINER STRUKTUR AUF EINEM SUBSTRAT MITTELS IONISCHER ORGANISCHER FOTOSÄUREGENERATOREN FÜR DUV, MUV UND OPTISCHE LITHOGRAFIE AUF DER BASIS VON PERACEPTOR- SUBSTITUIERTEN AROMATISCHEN ANIONEN
摘要
申请公布号
AT509299(T)
申请公布日期
2011.05.15
申请号
AT20080870322T
申请日期
2008.12.17
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GLODDE, MARTIN;LIU(, SEN;POPOVA, IRENE
分类号
G03F7/004;G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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